Loadpoint Carbon Dioxide Bubbler 3

The bubbler has been specifically designed for reducing the resistivity of high purity de-ionized water used for dicing and post dicing washing applications. The use of re-ionized water between 0.5 and 1 megohm resistivity reduces the damage to wafers during the dicing and cleaning process due to static electricity or deposition of cutting slurry. The Loadpoint bubbler used carbon dioxide gas to reduce the resistivity and is designed to work with the MicroAce dicing machine and Washpoint. It can de adapted to work with other dicing machines also. Carbon dioxide is readily available and the sophisticated control system means that it is used very economically.

The control panel displays the inlet and outlet water resistivity. Outlet resistivity can be set as well as the alarm for minimum inlet resistivity. There is a general alarm indicator and individual indicators for +/- 12 volts, low flow, inlet low resistivity, and outlet high resistivity. There is also a manual control for Carbon Dioxide disable.

Control Panel

The viewing panel enables the bubbling operation to be monitored in the mixing chamber. Critical pressure guages can be viewed. The cover can be quickly removed for set up and service needs. The entire water path is either stainless steel or plastic. The mixing unit is supplied with its own support frame and provision is made for wall mounting if needed.

For more information on the Carbon Dioxide Bubbler please see the brochure by clicking on the link below: